SEM/EDS/EBSD Analysis
EquipmentSEM/EDS/EBSD Analysis
An equipment used to magnify and observe the microscopic parts of a specimen to analyze its components
Introduction
Compared to optical microscopes that can only observe x2000 magnifications, the Scanning electron microscopes (SEM) can observe samples using x800,000 magnifications, so SEMs are widely used for sample surface observation. The device that can be also be used for x10-100 low-magnification observation. While the field of vision is narrow at high magnification, it is wider for lower magnifications, which is often useful for grasping the entire sample. SEM is an analytical device that measures the height of the sample by detecting and amplifying secondary electrons emitted from the sample surface when electron beam are shot onto the sample surface. At this point, the components of the observed sample can be analysed using the Energy Dispersive X-ray Spectroscopy (EDS) installed in the SEM equipment.
Application
Surface Analysis, Failure Analysis : Package, Die, PCB, SMT Level , Reverse Engineering, Voltage contrast imaging analysis, Size Measurement, EDS analysis
The Equipment
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Feature
Description
Model / Maker
Verios 5 / ThermoFisher Scientific
Function
EDS : Qualitative & Quantitative analysis
EBSD : Crystal Orientation, Grain size
GIS : C, Pt
SEM
E gun source
CFEG(Cold Field Emission Gun)
Voltage range
350V ~30kV
Resolution
0.6nm @30kV
Accessory
EDS
Oxford ultim max 100
EBSD
Oxford Symmetry S3
Application
High resolution SEM image (SE/BSE)
EDS : Qualitative @ Quantitative analysis
EBSD : Crystal Orientation, Grain size distribution
Technical Use Case
Contact Point
Person in charge- • TEL.
- 031-546-7555
- • E-mail.
- kwonhyeong.lee@qrtkr.com
