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Analysis Service

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SEM/EDS/EBSD Analysis

Equipment
SEM/EDS/EBSD Analysis

An equipment used to magnify and observe the microscopic parts of a specimen to analyze its components

Introduction

Compared to optical microscopes that can only observe x2000 magnifications, the Scanning electron microscopes (SEM) can observe samples using x800,000 magnifications, so SEMs are widely used for sample surface observation. The device that can be also be used for x10-100 low-magnification observation. While the field of vision is narrow at high magnification, it is wider for lower magnifications, which is often useful for grasping the entire sample. SEM is an analytical device that measures the height of the sample by detecting and amplifying secondary electrons emitted from the sample surface when electron beam are shot onto the sample surface. At this point, the components of the observed sample can be analysed using the Energy Dispersive X-ray Spectroscopy (EDS) installed in the SEM equipment.

Application

Surface Analysis, Failure Analysis : Package, Die, PCB, SMT Level , Reverse Engineering, Voltage contrast imaging analysis, Size Measurement, EDS analysis

The Equipment

  • Feature

    Description

    Model / Maker

    Verios 5 / ThermoFisher Scientific

    Function

    EDS : Qualitative & Quantitative analysis

    EBSD : Crystal Orientation, Grain size

    GIS : C, Pt

    SEM

    E gun source

    CFEG(Cold Field Emission Gun)

    Voltage range

    350V ~30kV

    Resolution

    0.6nm @30kV

    Accessory

    EDS

    Oxford ultim max 100

    EBSD

    Oxford Symmetry S3

    Application

    High resolution SEM image (SE/BSE)

    EDS : Qualitative @ Quantitative analysis

    EBSD : Crystal Orientation, Grain size distribution

Verios 5 / ThermoFisher Scientific

Technical Use Case

Contact Point

Person in charge
SEM Analysis Inquiry
• TEL.
031-546-7555
• E-mail.
kwonhyeong.lee@qrtkr.com